Grazing-Exit and Micro X-ray Fluorescence Analyses for Chemical Microchips

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Grazing-exit and micro X-ray fluorescence analyses for chemical microchips.

Grazing-exit x-ray fluorescence (GE-XRF) and micro x-ray fluorescence (micro-XRF) methods were applied to chemical microchips as a detection method. Since an energy-dispersive x-ray detector was used, the simultaneous detection of multiple elements was possible. An analyzing region was especially designed on the microchip so that a sample solution could be dried and concentrated in a suitable a...

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Grazing-Exit X-ray Analysis

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Grazing-exit X-ray spectrometry for surface and thin-film analyses.

Electron-probe x-ray micro analysis (EPMA) and particle-induced x-ray emission analysis (PIXE) were performed under grazing-exit conditions. To control the exit angle (take-off angle), a new sample holder having a stepping motor was developed for grazing-exit EPMA. A carefully polished surface of a stainless-steal sample was measured. The surface of stainless steel is normally covered with a th...

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Depth profiling of low energy ion implantations in Si and Ge by means of micro-focused grazing emission X-ray fluorescence and grazing incidence X-ray fluorescence

Depth-profiling measurements by means of synchrotron radiation based grazing XRF techniques, i.e., grazing emission X-ray fluorescence (GEXRF) and grazing incidence X-ray fluorescence (GIXRF), present a promising approach for the non-destructive, sub-nanometer scale precision characterization of ultra shallow ion-implantations. The nanometer resolution is of importance with respect to actual se...

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Micro X-ray fluorescence in materials characterization

Micro X-ray fluorescence ~MXRF! offers the analyst a new approach to materials characterization. The range of applications is expanding rapidly. Single point analysis has been demonstrated for nanoliter volumes with detection limits at the 0.5 ng level. MXRF can be used as an element specific detector for capillary electrophoresis. Elemental imaging applications include analysis of sample corro...

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ژورنال

عنوان ژورنال: Analytical Sciences

سال: 2005

ISSN: 0910-6340,1348-2246

DOI: 10.2116/analsci.21.799